Measurement Range Cold Cathode Gauge 1.0E-08Torr to 1.0E-03Torr SHIM Gauge KVC400 : 1.0E-3 to 1000Torr KVC500 : 1.0E-3 to 1500Torr Application Sensor Cold Cathode Gauge KVC400 SHIM Gauge KVC500 ATM SHIM Gauge Optional : Interface RS485 ASCⅡ, RS485 ModBus RTU RS232 ASCⅡ, RS232 ModBus RTU