Measurement Range
Cold Cathode Gauge
1.0E-08Torr to 1.0E-03Torr
SHIM Gauge
KVC400 : 1.0E-3 to 1000Torr
KVC500 : 1.0E-3 to 1500Torr

Application Sensor
Cold Cathode Gauge
KVC400 SHIM Gauge
KVC500 ATM SHIM Gauge

Optional : Interface
RS485 ASCⅡ, RS485 ModBus RTU
RS232 ASCⅡ, RS232 ModBus RTU