Compact designed body with minimal dead space Body materials comply with SEMI F-20, “Specification 316LSS Materials for UHP (Ultra High Purity) Grade Semiconductor Manufacturing Applications” Maximum flow capacity Minimal particle generation Minimal contributions of moisture, oxygen and hydrocarbon with UNILOK’s own special cleaning process in a certified clean room Excellent finish level of wetted areas with UNILOK’s own electro polish process Elgiloy® diaphragm material with strong durability as well as corrosion resistance for long cycle life PCTFE seat material with remarkable chemical and thermal resistance